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Article Dans Une Revue Journal of Applied Physics Année : 2013

Radio frequency sputtered Al: ZnO-Ag transparent conductor: A plasmonic nanostructure with enhanced optical and electrical properties

Résumé

Optimization of metal-based transparent conductors (MTCs) made of silver and aluminium-doped zinc oxide (AZO) prepared by radio-frequency (r.f.) sputtering has been carried out through tuning of metal film properties. The influence of morphology and related plasmonic features of AZO/Ag/AZO MTCs on their optical and electrical performance is demonstrated and it is shown that the nominal thickness of the silver layer itself is not the most crucial value determining the MTC performance. The MTC performance has been optimized by a search of deposition conditions ensuring fractal-type metal layer formation up to a certain coalescence state that enables full gaining from silver optical properties, including its plasmonic features. For 150 W- and 200 W-deposited silver, MTCs with maximum transmittance as high as 83.6% have been obtained. These coatings have a figure of merit as good as 0.01 Ω−1 and a remarkably wide spectral transparency region: transmittance higher than 70% down to 1200 nm for 200W-samples. Modelling of the MTC coatings is proposed additionally, based on variable angle spectroscopic ellipsometric measurements, which takes into account the variation of the optical properties of silver when deposited in various conditions and embedded in a semiconductor stack.
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Dates et versions

hal-00911152 , version 1 (28-11-2013)

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Anna Sytchkova, Marie-Luisa Grilli, Antonio Rinaldi, Sylvain Vedraine, Philippe Torchio, et al.. Radio frequency sputtered Al: ZnO-Ag transparent conductor: A plasmonic nanostructure with enhanced optical and electrical properties. Journal of Applied Physics, 2013, 114, pp.094509. ⟨10.1063/1.4820266⟩. ⟨hal-00911152⟩
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