@inproceedings{mercier:hal-00915925, TITLE = {{A micro-machined tunable cavity resonator}}, AUTHOR = {Mercier, Denis and Chatras, Matthieu and Orlianges, Jean-Christophe and Blondy, Pierre and Cros, Dominique}, URL = {https://unilim.hal.science/hal-00915925}, BOOKTITLE = {{European Microwave Conference 2003}}, ADDRESS = {Germany}, PAGES = {55}, YEAR = {2003}, MONTH = Oct, HAL_ID = {hal-00915925}, HAL_VERSION = {v1}, }