@article{dutheil:hal-01155620, TITLE = {{AlN, ZnO thin films and AlN/ ZnO or ZnO/AlN multilayer structures deposited by PLD for surface acoustic wave devices}}, AUTHOR = {Dutheil, Perrine and Orlianges, Jean-Christophe and Crunteanu, Aurelian and Catherinot, Alain and Champeaux, Corinne}, URL = {https://unilim.hal.science/hal-01155620}, JOURNAL = {{physica status solidi (a)}}, PUBLISHER = {{Wiley}}, SERIES = {Phys. Status Solidi A, 1--9 (2015)}, PAGES = {1-9}, YEAR = {2015}, MONTH = Jan, DOI = {10.1002/pssa.201431747}, KEYWORDS = {AlN ; ZnO ; multilayer ; PLD ; SAW devices ; ellipsometry}, HAL_ID = {hal-01155620}, HAL_VERSION = {v1}, }