@article{mortada:hal-01471351, TITLE = {{Analysis and optimization of acoustic wave micro-resonators integrating piezoelectric zinc oxide layers}}, AUTHOR = {Mortada, Oussama and Zahr, Abedel Halim and Orlianges, Jean-Christophe and Crunteanu, Aurelian and Chatras, Matthieu and Blondy, Pierre}, URL = {https://unilim.hal.science/hal-01471351}, JOURNAL = {{Journal of Applied Physics}}, PUBLISHER = {{American Institute of Physics}}, VOLUME = {121}, NUMBER = {7}, PAGES = {074504}, YEAR = {2017}, DOI = {10.1063/1.4976063}, PDF = {https://unilim.hal.science/hal-01471351/file/Paper%20Oussama.pdf}, HAL_ID = {hal-01471351}, HAL_VERSION = {v1}, }