@inproceedings{mortada:hal-01566490, TITLE = {{Effet de l'inhomog{\'e}n{\'e}it{\'e} des films de ZnO sur les performances de micro-r{\'e}sonateurs pi{\'e}zo{\'e}lectriques}}, AUTHOR = {Mortada, Oussama and Orlianges, Jean-Christophe and Crunteanu, Aurelian and Chatras, Matthieu and Blondy, Pierre}, URL = {https://unilim.hal.science/hal-01566490}, BOOKTITLE = {{Journ{\'e}es nationales micro-ondes}}, ADDRESS = {Saint Malo, France}, YEAR = {2017}, MONTH = May, HAL_ID = {hal-01566490}, HAL_VERSION = {v1}, }