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Communication Dans Un Congrès Année : 2009

Ku Band DMTL Medium Power Phase Shifters

Fabien Maury
  • Fonction : Auteur
Arnaud Pothier
Jean-Christophe Orlianges
David Mardivirin
  • Fonction : Auteur
  • PersonId : 919510
Tibault Reveyrand
F. Conseil
  • Fonction : Auteur
Pierre Blondy
  • Fonction : Auteur
  • PersonId : 915831


The first part of this paper deals with curled shunt capacitive MEMS switched varactors with good power handling capabilities. These devices have been able to achieve 1 billion cycles under 5 W in hot switching conditions. These cantilevers have been used as switched capacitors periodically loaded along a Coplanar Wave Guide (CPW) line to form a Distributed MEMS Transmission Line (DMTL) phase shifter. In the second part, the integration of these beams in 90° and 180° DMTL sections operating at 15 GHz is shown. For these respective configurations, phase shifts of 89.3° and 178° have been observed and validate this conception. With reasonable loss of 60°/dB, these devices are among the first MEMS based phase shifter in literature able to operate at such power level in hot s witching conditions.

Dates et versions

hal-00758893 , version 1 (29-11-2012)



Fabien Maury, Arnaud Pothier, Jean-Christophe Orlianges, David Mardivirin, Tibault Reveyrand, et al.. Ku Band DMTL Medium Power Phase Shifters. IEEE MTT-S Digest, IMS 2009, TH1E-3, Jun 2009, Boston - Massachusetts, France. pp. 1153-1156, ⟨10.1109/MWSYM.2009.5165906⟩. ⟨hal-00758893⟩


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