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Brevet Année : 2012

Microelectromechanical system with air gap

Pierre Blondy
  • Fonction : Auteur
  • PersonId : 915831
Stanis Courrèges
  • Fonction : Auteur
  • PersonId : 919469
Arnaud Pothier
Jean-Christophe Orlianges

Résumé

The present invention relates to an microelectromechanical system (1) comprising: a base (15) comprising a substrate (20) and a substrate electrode (40); a moveable beam (30); a voltage generator (10) able to generate a potential difference between the beam (30) and the substrate electrode (40); and at least one mechanical stop (70) connected to the beam and designed to make contact with the base (15) when a potential difference is applied between the beam (30) and the substrate electrode (40), thereby defining an air- ...
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Dates et versions

hal-00922828 , version 1 (30-12-2013)

Identifiants

  • HAL Id : hal-00922828 , version 1

Citer

Pierre Blondy, Stanis Courrèges, Arnaud Pothier, Jean-Christophe Orlianges. Microelectromechanical system with air gap. France, Patent n° : 2012020095. 2012. ⟨hal-00922828⟩

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