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Article Dans Une Revue Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on Année : 2012

Nanogap MEMS micro-replay with 70 ns switching speed

A. Verger
  • Fonction : Auteur
A. Pothier
C. Guines
  • Fonction : Auteur
Aurelian Crunteanu
Pierre Blondy
  • Fonction : Auteur
  • PersonId : 915831
J. Dehnnin
  • Fonction : Auteur
F. Courtade
  • Fonction : Auteur
O. Vendier
  • Fonction : Auteur

Résumé

Email Print Request Permissions Save to Project This paper presents Micro-electro-mechanical relays for very fast switching applications. Prototype relays have been fabricated tested and demonstrated reconfiguration capabilities as fast as 70 ns with a 300 ns additional settling time once electrical contact is fully stabilized. Such switching speed has been previously demonstrated on capacitive RF-MEMS switches, but this is the first time that such a fast mechanical switching is reported on relays, i.e. ohmic contact switches. The ability to open or close a contact at such speed can lead to many applications such as ultra low power electromechanical computing, or harsh environment electronics.

Domaines

Matériaux
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Dates et versions

hal-00943467 , version 1 (07-02-2014)

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Citer

A. Verger, A. Pothier, C. Guines, Aurelian Crunteanu, Pierre Blondy, et al.. Nanogap MEMS micro-replay with 70 ns switching speed. Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on, 2012, pp.717 - 720. ⟨10.1109/MEMSYS.2012.6170192⟩. ⟨hal-00943467⟩
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