Preparation of TiO, thin films by pulsed laser deposition for waveguiding applications
Résumé
TiO, thin films have been deposited on SiO,/Si, MgO and Al,O, substrates by Pulsed Laser Deposition with a KrF excimer laser from a Wile ceramic target. From X-ray diffraction and Raman spectroscopy, their crystalline structure appear to be mainly anatase. The potentialities of waveguiding properties have been evaluated by measuring refractive index and thickness with m-line spectroscopy.
Domaines
Matériaux
Fichier principal
Applied Surface Science 96-98 (1996) 836-841.pdf (416.8 Ko)
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